600 mm, 1000 mm, 1500 mm travel sizes
685 mm square carriage
910 kg load capacity
an be vacuum 10-6 Torr rated
Bellows covers to protect from particles, laser slag
Accuracy ±8 µm calibrated, ±50 µm uncalibrated
Air purge for positive air pressure
The ATS5000HD (Heavy Duty) linear ball-screw stage is a high-capacity stage with bellows waycovers that can be used for high-load motion testing, laser sintering, aerospace testing, and vacuum applications with up to a 910 kilogram load.
| ATS5000HD | ||||||
|---|---|---|---|---|---|---|
| Positioning | Travel |
600/1000/1500 mm | ||||
| Accuracy | LT Standard | ±40.0 µm | ||||
| HALAR(1) | ±1 µm | |||||
| Repeatability | ±0.5 µm | |||||
|
Geometric | Straightness |
±9.0 µm | ||||
| Flatness |
±9.0 µm | |||||
| Pitch | ±121 µrad (±25 arc sec) | |||||
| Roll | ±121 µrad (±25 arc sec) | |||||
| Yaw | ±121 µrad (±25 arc sec) | |||||
| Dynamic | Maximum Speed(2) | 200 mm/s | ||||
| Maximum Acceleration(2) | 3g | |||||
| Other | ||||||
| Load Capacity(3) | Axial | 910 kg | ||||
| Vertical |
300 kg | |||||
|
Stage Mass |
120 kg (1000 mm travel with motor) | |||||
| Material |
Aluminum body/stage; hardcoated tabletop | |||||
Available with Aerotech controllers.
Speed and acceleration dependent on load.
Maximum load based on bearing capability. Maximum application load may be limited by acceleration requirements.
Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and work-point dependent. Consult factory for multi-axis or non-standard applications.