1. 多功能／同步分析功能

>拉曼测试

>发光测试

>激光反射及透射测试

>激光反射3D高对比度成像

>3D拉曼共聚焦成像

>光谱及偏振信息

2高空间分辨率

>水平高达200nm

>垂直高达500nm

3 宽光谱范围30-6000cm－（取决于激光器）

4 可同时安装5台激光器，通过内部组件自动切换

5. 扫描模式包含基于CCD的拉曼mapping以及基于PMT的快速扫描功能，1000*1000点扫描只需要3秒！

6. 基于特殊设计的光谱仪，光谱分辨率高达0.006nm，畸变小于5um

7. 支持正置或倒置显微镜

8. 放大率可调整的光路系统，匹配显微物镜孔径3-12mm

9. 发射测试模块可同步获得激光反射3D成像

10. 系统完全自动控制

11. 高时间及温度稳定性

12. 系统无光纤，保持良好的光学参数（透射、波前以及偏振等）

13. 环形照明模块匹配AFM

Raman spectrum of Si wafer. Si (4) peak is clearly detected. Si (1) and Si (2) are in deep saturation. Confocal mode. Accumulation time - 60 seconds.

488 nm laser, 5 mW power

Signal decrease from 90 % to 10 % at 200 nm,  λ=514 nm, 100Х immersion lens

Resolution along Z-axis.

The reflection from silicon wafer, obtained by moving the objective lens along the Z axis.

FW HW - 442 nm, λ=488 nm, 100x objective lens.

Specially designed monochromator-spectrograph with unique parameters:

spectral resolution up to 0.006 nm, astigmatism less than 5 µm.

Absolute wavelength accurasy: about 0.016 nm

(for grating 2400 l/mm).

Pinhole spectral image at CCD camera.

Pixel size: 12 µm.

Pinhole size: 12 µm. Image size: 1.5 pixel