The GTS30V is a compact, vertical stage that combines outstanding trajectory accuracy with fine adjustment capability of 0.1 μm Minimum Incremental Motion with a travel range of 30 mm. Features include: a vertical guide system composed of matched pairs of anti-creep crossed roller bearings resulting in high-precision, ripple-free motion, a folded DC motor with a precision ground and a low-friction lead screw designed to deliver ultra-smooth motion. The GTS30V also does not back drive even with heavy loads, offering excellent in-position stability. A reduction belt between the motor and lead screw increases available output torque and robustness for servo loop sensitivity. The GTS30V is ideal for applications such as semiconductor wafer inspection, scanning, microscopy, laser machining, automated device alignment, metrology, quality control and applications requiring long travel vertical motion of 30 mm.

• 行程范围

  30 mm

• 最小位移增量

  0.10 µm

• 最大速度

  10 mm/s

• 中心负载

  40 N

• Accuracy, Typical

  ±0.37 µm

• Accuracy, Guaranteed

  ±0.75 µm

• 双向重复精度，典型值

  ±0.07 µm

• 双向重复精度，保证值

  ±0.10 µm

• 驱动螺距

  1 mm

• Encoder Resolution

  0.050 µm

• 限位开关

  Optical

• 原点

  Optical, close to lower limit

• 原点重复精度

  ±0.05 µm

• 电缆长度

  3 m  

• 接头

  DB25 Male

• 俯仰，典型值

  ±20 µrad

• Pitch, Guaranteed

  ±25 µrad

• 俯仰顺应性

  40 µrad/Nm  

• Roll, Typical

  ±12 µrad

• Roll, Guaranteed

  ±25 µrad

• 翻转顺应性

  40 µrad/Nm  

• 偏摆顺应性

  25 µrad/Nm  

• 典型平面度（保证值）

  ±0.75(na) µm

• 典型直线度（保证值）

  ±0.75(na) µm

• 螺纹类型

  M4 and M6

• 重量

  3.3 kg  

• MTBF

  20,000 h (25% load, 10% duty cycle)

• RoHS

  Compliant

GTS30V是一个紧凑,垂直具有微调功能的阶段,结合优秀的轨迹精度0.1μm最小增量运动与旅行30毫米的范围。特点:垂直导轨系统由一对匹配的抗蠕变交叉滚子轴承组成，具有高精度、无波纹的运动，折叠的直流电动机具有精确的接地，低摩擦的丝杠设计来提供超光滑的运动。GTS30V即使在负载很重的情况下也不会倒车，提供了极佳的位置稳定性。电机和丝杠之间的减速带增加了可用的输出扭矩和伺服回路灵敏度的稳健性。GTS30V非常适用于半导体晶片检测、扫描、显微镜、激光加工、自动化设备校准、计量、质量控制以及需要长行程垂直运动30毫米的应用。