The NPXYZ100SGV6 Vacuum Compatible Three Axis Nanopositioning Linear Stage is a 100 um travel piezo-based stage providing nanometer resolution motion in XYZ. It is ideally suited for nanopositioning of small components such as mirrors, fibers, laser diodes, micro-optics, sensors, or cellular samples. Applications include optical delay lines, path length changes of interferometers, laser lithography, scanning microscopy, and patch-clamping, among others. NPX stages feature highly reliable, multi-layer, low-voltage piezoelectric transducer (PZT) stacks for high-duty cycle operations. A sophisticated, FEA-optimized, parallelogram solid state flexure guide system ensures perfect parallel motion. Due to the frictionless guide principle, NPX stages are maintenance-free and are not subject to wear. One advantage is the rapid response and fast settling performance. This allows them to be used in dynamic processes such as high-frequency error compensation, tracking, fast stepping or continuous scanning. In this open-loop version, the resolution is only limited by the noise of the control electronics, but repeatability and stability are compromised due to the hysteresis and creep of the piezoelectric ceramic material. Fastening is easy with a number of threads and alignment pin holes at the top and bottom plates. For mounting to optical tables or other components with the same hole grid, use adapter plate NPX-BP. Like with all piezo flexure devices, excessive moment loads and side forces acting between the top plate and the housing should be avoided during fastening.
Use with the NPC3SG Nanopositioning Amplifier.


与NPXYZ100SGV6真空兼容的三轴纳米级线性级是一个100um的行程压基级，提供XYZ中的纳米分辨率运动。它是理想的纳米定位小部件，如镜子，光纤，激光二极管，微光，传感器，或细胞样品。应用领域包括光延迟线、干涉仪的路径长度变化、激光光刻、扫描显微镜、贴片夹紧等。NPX级具有高可靠性，多层，低压压电换能器(PZT)栈为高占空比操作。一个复杂的，有限元优化，平行四边形固体弯曲导向系统，确保完美的平行运动。由于无摩擦导向原理，NPX级是免维护的，不受磨损。其优点之一是响应快、沉降快。这使得它们可以用于高频误差补偿、跟踪、快速步进或连续扫描等动态过程。在这种开环版本中，分辨率仅受控制电子学噪声的限制，但由于压电陶瓷材料的滞后和蠕变，影响了其重复性和稳定性。紧固很容易，在顶部和底部板上有许多螺纹和定位销孔。如果要安装到光学表或具有相同孔网格的其他组件上，请使用适配器板NPX-BP。与所有压电弯曲装置一样，在紧固过程中，应避免在顶板和壳体之间施加过大的力矩载荷和侧向力。

与NPC3SG纳米级定位放大器一起使用。