EX5 EXCIMER LASER

2.5W of deep UV (193nm) in 1.2 cubic feet
Total system lifetime > 5 Billon pulses

Applications

• Ionization source

• Compact OEM systems

• Micromachining

• Refractive Surgery

A genuine full function, low cost MINI excimer laser in an ultra compact 48 X 26 X 26cm, 15kg, air cooled package with up to 8.0W at 248nm and 4.0W at 193nm and up to 500Hz repetition rate. The laser design features include an internal Faraday cage for ultra low electrical noise and a total metal/ceramic laser chamber.

NEW TYPE II SUPERCHAMBER

The EX5 is now available in 250Hz, 500Hz and 1000Hz versions. The TYPE III SUPERCHAMBER produces higher average power output with longer gas lifetime. F2 operation in the VUV is also standard with up to 1W output power.

A new broadband optics set allows operation from 157nm to 351nm with full specifications simply by changing the gas. A 500Hz Industrial version is also available.

Key Benefits

• Long sytem lifetime for Industrial installations

• The most powerful mini excimer available anywhere

• Mini excimer in a single package

• Internal vacuum pump and halogen filter

• Computer controlled

• Ultra Low trigger jitter

• High reliability state of the art, long life laser chamber

• Excellent pulse to pulse stability

• Very long shelf life

• 250Hz, 500Hz and a NEW 1000Hz version

• The latest in materials science TYPE III SUPERCHAMBER

• High duty cycle Industrial version

• 25mJ TEM00 C0₂ TEA Version

Specifications

EX10 EXCIMER LASER

For applications requiring high repetition rate and moderate average power, when you need a compact air cooled laser, the EX10 is the choice.

The EX10 excimer laser offers state of the art performance in a compact package and provides a highly reliable, powerful source of ultraviolet radiation. Repetition rates of 300Hz and 600Hz in air cooled units, an average power of 12W with KrF at 248nm and 6.5W with ArF at 193nm give of operation between refills using XeCl.

Ideal for applications in micromachining, tunable laser pumping, marking and mass spectrometry. A 1000Hz water cooled version is also available.

Turn Key Table Top System

The EX10 laser is total metal/ceramic device and uses an advanced linear design to produce high energy output in a compact package. The carefully chosen materials for laser construction give the EX10 static and dynamic gas lifetimes unmatched by any other excimer laser. The gas lifetime advantage is particularly noticeable with F2 at 157nm in the VUV where static gas lifetime is over 15 days compared to 1 day for most excimer lasers. A optimized F2 version the EX10F is recommended for dedicated 157nm operation.

The EX10 is designed for medical, scientific and industrial applications where long term service free operation is required. Software automatically maintains constant , highly stable (<2%), energy output using the standard internal energy monitor. The software also warns the user if maintenance is required. The laser can operate directly from a PC for remote programming and software upgrading. The EX10 of course includes standard features such as active thermal stabilization, constant power and energy control, external triggered operation, sync out, automatic refill and automatic gas control. The laser can be completely controlled from a Windows 9x or Windows NT software package.

High Efficiency Discharge

High efficiency is the key to outstanding laser performance. The EX10 operates with up to 3 times the efficiency of similar mini excimer lasers. This means that only 1/3 of the energy input is required to achieve the same optical output. The optimized soft corona preionization state creates a uniform high efficiency discharge at repetition rates up to 1000Hz with a switching jitter of less than 2nS standard deviation. Additionally the increased efficiency greatly decreases the wasted energy deposited to the discharge and results in reduced EMI and much reduced electrode and component wear. This also increases total system lifetime and allows air cooled operation at the highest repetition rates.

Key Benefits

• Easy to use all in one compact package

• Internal vacuum pump and Halogen filter

• Computer controlled

• High pulse to pulse stability

• Ultra long gas lifetime

• The latest total metal/ceramic technology

• High stability corona preionization

• 1 Billion pulse optics service

• 50mJ/100Hz TEA CO2 Version

Specifications

The EX50/1000 35W KrF Laser

For applications requiring high repetition rate and moderate average power, when you need a compact air or water cooled laser, the EX50 is the choice.

The EX50 excimer laser offers state of the art performance in a compact package. The EX50 provides a highly reliable powerful source of ultraviolet radiation. Four models with repetition rates up to 250Hz, 500Hz and 750Hz are available with average powers to 35W with KrF at 248nm and 18W with ArF at 193nm. Long gas lifetime gives up to 1 year of operation between refills with XeCl. For applications in precision micromachining, tunable laser pumping, marking and semiconductor processing.

The EX50 laser is a total metal/ceramic device of advanced design. The carefully selected materials used in the laser construction give the EX50 static and dynamic gas lifetimes unmatched by any other excimer laser.

Applications

• Pulsed laser deposition

• Ionization

• Micromachining

Key Benefits

• Up to 750Hz repetition rate

• Internal vacuum pumps and Halogen filter

• High Power in a compact package

• High reliability long life laser chamber

• Excellent pulse to pulse stability

• 1 Billion pulse optics service

• Soft Corona preionization

Specifications

The EX50LN Excimer Lasers

Applications

• Spectroscopy

• Semiconductor metrology

• Optical tetsing

Key Benefits

• Narrow linewidth in a single table top package

• High spectral intensity

• Tunable deep UV source

• Optional Ultra Narrow, 0.5pm, 0.3pm and 0.08pm Linewidth

• Available Oscillator Amplified line narrowed system

Narrowband lasers use intra cavity wavelength dispersive elements to line narrow the free running spectral range of excimer lasers. Linewidths of less than 1pm are routinely obtained in table top systems.
A free running excimer laser with a stable resonator produces a spectral output with a relatively wide bandwidth. For example free running ArF has a bandwidth of approximately 500pm FWHM. The spectral output can be greatly narrowed by inserting wavelength dispersive optical elements into the laser cavity . The narrow band output can also be tuned over a region which is typically close to the free running bandwidth of the laser. With both ArF and KrF linewidths of less than 1pm can be obtained. Narrow band excimer lasers exhibit exceptional coherence properties. For FBG BraggMaster lasers applications, which produce high spatial and high temporal coherence are recommended.

The EX50LN is available in a number of repetition rate models from 125Hz up to 1000Hz with up to 8mJ of narrow band energy at 248nm and 3mJ at 193nm. Higher energy output is available from an oscillator amplifier line narrowed system which produces up to 100mJ of highly line narrowed 248nm output.
Specificaion
 

EX100 EXCIMER LASER

The EX100 excimer lasers are designed to provide high power industrial laser performance in a low cost, high reliability system. The unique linear design of GAM LASER products allows power scaling to be achieved at low incremental cost. The EX100 provides the first cost effective high power excimer laser.

The EX100 gives repetition rates to 750Hz with all excimer gases and F2 at 157nm, lower repetition rate versions are also available. The laser gives up to 68W output power with KrF and 32W with ArF.

Exceptional dynamic and static gas lifetime is obtained from the total metal/ceramic design and corona preionization system with over 30 million pulses to 50% energy on KrF and 12 weeks static gas lifetime. An industrial version gives longer gas lifetime. The laser is a total metal/ceramic device and uses the most advanced design of any commercial excimer laser.

Application

• Pulsed laser deposition

• Ionization

• Micromachining

Key Benefits

• A powerful high repetition rate system in a compact package

• Low divergence output

• Excellent pulse to pulse stability

SPECIFICATIONS

EX350 EXCIMER LASER

The EX350 is a high energy excimer laser producing up to 250mJ output energy at 248nm and 150mJ at 193nm. The laser is designed for applications requiring high pulse energy such as Pulsed Laser Deposition.

Key Benefits

• Available in 20Hz and 50Hz versions

• High Energy in a single table top package

• Low divergence beam

• Computer controlled scientific instrument

• Low Jitter <2nS standard deviation

Specifications

SE-Version 紫外激光器

Lasers for Semiconductor Applications (SE-Version)THE ULTIMATE IN EXCIMER LASER TECHNOLOGY
Semiconductor processing, mask inspection, microlithography and metrology lasers are available which meet CE mark and SEMI S2 standards. All semiconductor excimer lasers use the latest total metal/ceramic technology for maximum laser lifetime with minimal service. SE-version excimer lasers feature clean room packaging, longer chamber lifetimes and longer gas lifetimes than standard excimer lasers.
SE-Version Features

 

	10 Billion pulse system lifetime
	Guaranteed <1% stability
	200 Million pulses on a single ArF 193nm gas fill
	Hard anodize clean room package
	Meets SEMI S2 standards

 
The EX10SE Semiconductor Excimer Laser
SE Versions are available for EX10, EX50, EX100 and EX100H products.
EX10SE specifications

INDUSTRIAL LASER PRODUCTS (IN Versions)

Total Metal/Ceramic SUPERCHAMBER II Industrial lasers feature additional technology to improve gas, optics and system lifetimes.

Industrial laser products are specially designed for 24/7 operation at high duty cycle or continuous operation at maximum repetition rate. The lasers utilize high performance components and improved discharge technology to increase gas and system lifetime. Industrial versions are available for the model EX5, EX10 and the EX50 lasers. Industrial lasers have additional gas conditioning and lifetime enhancing components to give maximum reliability.

Industrial versions provide reliable long term operation with a minimum of service. The lasers can operate continuously for hundreds to thousand s of hours without maintenance depending upon repetition rate.

Applications include semiconductor inspection, marking, micromachining, FBG fabrication and OEM systems.

• Highly reliable high duty cycle/continuous use

• Over 1 billion pulses hands free operation

• Long life laser chamber, up to 4 billion pulses

• High stability output <2% standard deviation

• Internal energy detector

EX5IN SPECIFICATIONS

EX10IN SPECIFICATIONS

EX50IN SPECIFICATIONS