Description

Design Features

Accuracy: <0.6 microradian (<0.12 arc-second)
Minimum incremental step: 0.035 microradian (0.007 arc-second)
Repeatability: <0.4 microradian (<0.08 arc-second)
Axial Error Motion: <50 nm synchronous; <10 nm asynchronous
Radial Error Motion: <75 nm synchronous; <10 nm asynchronous

Air-Bearing Rotary Master Axis

The ABRT400 is the heart of Aerotech's µARC Angle and Rotary Device Calibration System. The ABRT400 is a large rotary air-bearing axis with nanometer-level error motion performance. This high-accuracy air-bearing master axis is constructed of steel to closely match the CTE of the µARC's surrounding granite structure. The air bearing is equipped with a non-influencing rotary union and slip ring to pass vacuum or air and electrical service to the device under test.

The ABRT400 can be used as the angular standard in high-accuracy measuring machines, x-ray diffraction, protein crystallography or high-precision machining applications.

Accuracy Plot

Specifications

Rotary Air-Bearing Stage Comparison

Model	ABRT260	ABRT400	ABRT400
Performance Version	Standard	Standard	High-Accuracy
Accuracy	19.4 µrad (4 arc sec)	9.7 µrad (2 arc sec)	0.6 µrad (0.12 arc sec)
Repeatability	<4.9 µrad (<1 arc sec)	<4.9 µrad (<1 arc sec)	0.4 µrad (0.08 arc sec)
Axial Error Motion (Synchronous)	<100 nm	<100 nm	<50 nm
Radial Error Motion (Synchronous)	<150 nm	<250 nm	<75 nm
Tilt Error Motion (Synchronous)	<2.4 µrad (<0.5 arc sec)	<2.4 µrad (<0.5 arc sec)	<0.5 µrad (<0.1 arc sec)
Axial Error Motion (Asynchronous)	<20 nm	<20 nm	<10 nm
Radial Error Motion (Asynchronous)	<20 nm	<20 nm	<10 nm
Tilt Error Motion (Asynchronous)	0.19 µrad (0.04 arc sec)	0.19 µrad (0.04 arc sec)	0.05 µrad (0.01 arc sec)
Load Capacity Axial	69 kg	110 kg	200 kg
Load Capacity Radial	10 kg	90 kg	50 kg
Slip Ring	Optional	Optional	Optional