Description

Design Features

2 µm calibrated accuracy with linear encoder
0.1 µm min incremental motion with linear encoder
±40 µm uncalibrated accuracy with rotary encoder
4 mm ball screw
Vacuum compatible
135 kg horizontal load capacity
Gearbox option shown

The ATS5000 high-accuracy, 1.5 meter travel ball-screw stage can be used in horizontal or vertical applications for research, aerospace testing, light source/beamline applications, and in any manufacturing requiring a high load with very precise motion performance.

Specifications

Mechanical Specifications

ATS5000
Positioning	Travel		1500 mm
	Accuracy	LT Standard	±40.0 µm
	Accuracy	HALAR⁽¹⁾	±2 µm
	Repeatability		±0.5 µm
Geometric	Straightness		±13.0 µm
	Flatness		±13.0 µm
	Pitch		±170 µrad (±35 arc sec)
	Roll		±170 µrad (±35 arc sec)
	Yaw		±170 µrad (±35 arc sec)
Dynamic	Maximum Speed⁽²⁾		200 mm/s
Dynamic	Maximum Acceleration⁽²⁾		3g
Other
	Load Capacity⁽³⁾	Horizontal	135 kg
	Load Capacity⁽³⁾	Side	45 kg
	Stage Mass		125 kg
	Material		Aluminum body/stage; hardcoated table

Available with Aerotech controllers.
Speed and acceleration dependent on load.
Maximum load based on bearing capability. Maximum application load may be limited by acceleration requirements.
Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and work-point dependent. Consult factory for multi-axis or non-standard applications.

Description

Design Features

Specifications

Mechanical Specifications

Dimensions

Ordering Information