Design Features

High-speed brushless servomotor
Instrument-grade precision
ABEC-7 angular contact bearings
Balanced to ISO 1940 G 1.0
High acceleration capability (6000 rpm in < 1 second)
Custom configurations available

Aerotech's ASR series direct-drive spindles were designed to provide superior angular positioning and velocity control for applications including disk drive testing, imaging applications, and precision wafer inspection.

Superior Mechanical Design
Matched angular contact bearing sets minimize spindle error motions. In addition, the ASR2000 is balanced to ISO 1940 G 1.0 tolerances. This unique design includes externally accessible balancing screws that can be adjusted with final payload in place. The design also uses labyrinthtype sealing to minimize particle migration from the spindle, resulting in certification for Class 1 clean-room operation. An integral rotary union is provided for a vacuum supply.

Brushless Direct Drive
To maximize positioning performance, the ASR series utilizes Aerotech's brushless motor technology. These motors have all the advantages of a brushless direct-drive motor — no brushes to wear, and high acceleration and high speeds. With its low inherent inertia and high torque output, the ASR is capable of extremely high speeds and accelerations. In addition, the efficient electromagnetic design provides high performance with lower operating temperatures than comparable products.

Accurate Positioning
With a velocity ripple of <0.1%, a total radial error motion =5 µm, and total axial error motion <2 µm, the Aerotech spindle offers superior performance for high accuracy applications. The high performance motor and rotary encoder are directly coupled to a common shaft. The absence of gear trains and mechanical couplings means no position errors caused by hysteresis, windup, or backlash.

Flexible Configurations
Options include mechanical or vacuum chuck configurations. Aerotech manufactures a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.

Specifications

ASR2000 Specifications

Basic Model		-60	-100	-130
Motor		S-50-52-B	S-50-86-A	BM130
Continuous Current, Stall	A_pk	4.6A	2.1A	7.5A
Continuous Current, Stall	A_rms	3.3A	1.5A	5.3A
Feedback		Directly-Coupled Rotary Encoder
Resolution		256-2048 lines/rev - other line counts available
Rated Speed⁽¹⁾		6000 rpm in < 1 second
Maximum Load	Radial	89 N
Maximum Load	Axial	89 N
Inertia (Unloaded)		0.0002 kg-m²
Total Error Motion	Radial	5 µm
Total Error Motion	Axial	2 µm
Asynchronous Error Motion	Radial	3.5 µm
Asynchronous Error Motion	Axial	1.5 µm
Velocity Ripple		<0.1% at 6000 rpm
Balance Grade⁽²⁾		ISO 1940 G 1.0
Bearing Rigidity	Radial	20 N/µm
Bearing Rigidity	Axial	20 N/µm
Spindle Weight		33 N
Material	Shaft	Steel
Material	Housing	Aluminum (Steel Available)
Finish		Electroless Nickel Plating or Black Hardcoat Available

Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system resolution.
Per ISO 1940, "Mechanical vibration - balancing quality requirements of rigid rotors".

ASR2000 Error Motion Trace

Ordering Information

Ordering Example

ASR2000

-60

-PL3

-TAC

ASR2000 High-Speed Spindle

Option	Description
-60	63 mm (2.48 in) diameter rotary spindle 0.42 Nm (59 oz-in) motor
-100	63 mm (2.48 in) diameter rotary spindle 0.69 Nm (98 oz-in) motor
-130	63 mm (2.48 in) diameter rotary spindle 1.0 Nm (140 oz-in) motor

Performance Grade (Required)

Option	Description
-PL3	Standard Performance

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option	Description
-TAS	Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC	Integration - Test as components Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.