• Up to 150 mm travel in very compact and ultra-low profile design

  • All-steel construction offers high stiffness and high thermal stability

  • 20,000 cts/rev rotary encoder on DC motor versions enables 0.1 µm resolution for tightest position control

  • Economical stepper motor version with high motion sensitivity

  • Vacuum compatible versions up to 10-6 hPa (see additionalvacuum stages)