• UHV version compatible to 10–9 Torr; vacuum version compatible to 10-6 Torr

• 1/2, 1, and 2 travel ranges, rotating and European-type-mounting versions

• Set-and-forget long-term stability

• Teflon or Kapton wires available 

The New Focus vacuum Picomotor actuators can be used in either vacuum (10-6 Torr) or UHV (10–9 Torr) environments as well as for VUV/EUV applications. Ideal for beam-steering and scientific vacuum motion-control applications, these Picomotor actuators offer vacuum compatibility down to 10-6 or 10–9 Torr with reliability you can count on. As with our Picomotor actuators, these vacuum versions offer the same 30-nm resolution over the full travel along with excellent long-term stability and high stiffness—including the ability to maintain its set position even in the power off state.

As with all of our Picomotor actuators, these are easily incorporated into OEM designs for linear actuation as well as into optical mounts and stages for precision tip-tilt beam-steering adjustments.

Use the Model 8341 for times when you want rotation without translation.

Use these Picomotor actuators with our Model 8742 Intelligent Picomotor controller/driver or Model 8703 TTL/Analog driver. These provide the ability to build a system incorporating multiple standard and vacuum-compatible Picomotor actuators on the same control network.

Since these actuators and related opto-mechanical products have been designed specifically for semiconductor-capital-equipment manufacturers and the vacuum community, New Focus™ characterizes these clean products using standard Gas Chromatography-Mass Spectrometry analysis (GCMS). Such products have been tested and measured to outgas less than 5 ppm of volatile mass at 85 °C over three hours. Mass spectrograms detailing the exact outgassing compounds are available on request.

A Note on Our Vacuum-Compatible Picomotor Actuators in High-Radiation Applications

All New Focus vacuum compatible and ultra-high vacuum compatible Picomotor actuators come with short, Teflon®-coated leads so you can make connections to your vacuum-chamber feedthrough. Working with x-rays or other high-radiation applications can require ordering a Kapton®-coated wire version. While Teflon is compatible for use in high-vacuum environments, it is not recommended for use in high-radiation applications where, with repeated exposure to X-rays and other radiation, it can degrade and fall off, possibly causing electrical shorts. Please see the specifications tab for which models are available with Kapton wires.

UHV picomotors with Teflon Wires

Model 8301-UHVModel 8302-UHVModel 8321-UHV

UHV picomotors with Kapton Wires

Model 8301-UHV-KAPModel 8302-UHV-KAPModel 8321-UHV-KAPModel 8353-UHV

Closed Loop Vacuum Picomotor Actuator

Model 8310-V

• Compatible to 10–6 Torr

• Calibrated highly accurate positioning with all the benefits of our traditional Picomotor actuators

• Completely compatible with our Picomotor Controller/Drivers

This vacuum compatible Model 8310-V closed-loop Picomotor actuator is ideal for applications where closed-loop control and position calibration is required in a clean environment. Model8310-V offers an integrated rotary encoder and home, forward, and reverse limit switches. It combines the best attributes of our vacuum-compatible Picomotor actuator—<30-nm resolution, >5 lbs (22 N) of force along with set-and-forget long-term stability and vacuum compatibility—with the added benefits of exceptional accuracy and ±1-µm bi-directional repeatability over the entire travel range.

Use the Model 8743-CL closed-loop Picomotor controller/driver to control the Model 8310-Vclosed-loop Picomotor actuator. Our modular Picomotor controller/drivers provide the ability to build a system incorporating multiple standard Picomotor actuators and one or more closed-loop Picomotor actuator at the same time on the same control network.

Tips for Achieving Nanometer-Scale Performance with the Closed-Loop Picomotor™ Actuator

The closed-loop Picomotor actuator offers <1-µm repeatability when approaching a target encoder count from any direction, <0.5-micron repeatability when approaching from a single direction, and 63.5-nm encoder resolution. (The actual inherent motor step size is considerably smaller—approximately 20 nm.) To achieve consistent nanometer-level performance, you need only keep a few precautions in mind.

Use a small amount of lubricant between the stainless-steel ball tip and the load surface to prevent wear and the generation of debris in the interface. We recommend Krytox GPL 205 or the low-vapor pressure grease, LVP LCT-42.

Keep the interface between the stainless-steel ball tip and the load surface clean of debris. Even small particles on the order of a micron can result in 0.1 to 10 micron differences between the encoder reading and the actual moved distance.

Push against smooth, hard, flat surfaces only, such as the sapphire pads used in New Focus mirror mounts and translation stages. Pushing on aluminum or stainless-steel surfaces will wear out the ball tip. If the load surface is too soft, small amounts of material can build up in the interface between the ball tip and load surface resulting in surface roughness which can degrade repeatability. Do not push against cone or v-shapes, especially in softer materials such as aluminum. When the ball wears against a cone or v-shape in softer materials, particle generation can lead to increased friction and torsional loads. These torsional loads can easily exceed the torsional load limit of 2.5 oz-in (0.018 N•m) thus stalling the motor.

Avoid damage to the screw threads. Do not touch the screw threads with any hard object—even lightly. To provide the fine resolution, the screw has very fine-pitch threads. If the threads are damaged, this damaged area will produce repeated excessive wear within the fixed motor housing and significantly reduce the lifetime of the motor.

Avoid clamping tightly on the motor’s housing. This can cause increased friction between the rotating inner screw and the fixed exterior housing resulting in slowed motor motion or complete failure. This can also result in damaged screw threads.

Periodically examine the stainless-steel ball tip and the load surface for wear.

Picomotor™ Actuator Ultra

Model 8330 with Model 8338 cable

• Ultraclean for VUV/EUV and UHV environments

• <30-nm resolution with a non-rotating tip

• >5,000-cycle lifetime

The Model 8330 Picomotor actuator Ultra was designed specifically to minimize contamination and outgassing in clean-critical environments including vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) applications. A special sealed bellow ensures the cleanliness of the actuators throughout its travel range. The actuators are ideal for precision motion-control and beam-steering applications in the semiconductor industry or in scientific laboratories down to pressures as low as 10–9 Torr.

The actuator offers <30-nm resolution (over a 3-mm travel range) along with exceptional long-term set-and-hold stability. They are extremely stiff and can hold their set position with no applied power. Because of their compact size, they can be easily incorporated into OEM designs for linear actuation as well as into optical mounts and stages for precision tip-tilt beam-steering adjustments. The non-rotating tip results in even better motion resolution.

Use the Picomotor actuator Ultra with our Picomotor controller/driver modules. Combined with our standard 8743-CL closed-loop Picomotor driver and an external encoder, they can be operated as a closed-loop device over their full 3-mm range of travel. Limit switches and built-in hard stops protect the device and your equipment from over-travel.

The Picomotor actuator Ultra has been measured to outgas less than 0.1 ppm of volatile mass at 85 °C over three hours using standard Gas Chromatography-Mass Spectrometry analysis (GCMS). Mass spectrograms detailing the exact outgassing compounds are available on request.

We offer two cables to connect the actuator to the driver—either directly or through a standard feedthrough and then to the driver.