Nikon VMZ-K3040 & VMZ-K6555 共轭焦影像测量系统

Simultaneous wide-area height measurements with confocal optics and 2D measurement with 15× brightfield zoom optics.


VMZ-K3040

VMZ-K6555

XY Stroke (mm)

300×400

650×550

Magnification (Type S)

1.5× / 3× / 7.5×

1.5× / 3× / 7.5×

Magnification (Type H)

15× / 30×

15× / 30×

Z-axis Stroke (mm)

150

150

Max. guaranteed loading capacity (kg)

20

30

Max. permissible error U1X, U1Y (µm)

1.5+2.5L / 1000

1.5+2.5L / 1000

Max. permissible error of Z axis (µm)

1+L / 1000

1+L / 1000























Zoom Heads

Confocal NEXIV incorporates confocal optics for fast and accurate evaluation of fine three-dimensional geometries.

Confocal Optics are designed for wide FOV height measurement.

  • High Contrast and Multileveled Sample (PCBs)

Brightfield observation can sometimes be difficult due to blurred lines along sample structure. These lines can be clearly observed and measured using Confocal optics. 

  • Thin Transparent Samples (Metal Surface Film / Semiconductor Resist)

Top layers of both thin transparent film and metal surface can be easily detected using Confocal optics.