Nikon OST3100 /12" Wafer Inspection

The OST3100 is suitable for bumping house ,testing house,OQA department.Thanks for multi-function design and customers' co-work.

Overview
‧Available for 8" and 12" wafer inspection 
‧Enable bending wafer and Thin wafer macro and micro inspection 
‧High resolution wafer surface and backside macro capture function

‧KLARF file review software is available 
‧IDM software enable to testing process for good die and bad die inspection 
‧FOUP/FOSB handle 
‧Auto focus and motorized stage 
‧Large area and high brightness macro illuminator