Travel Dependent

Travel Range (deg)360°, limitless





































































































































































































































































































































































































































































































































































































































































































































































































































































































































































































































Flatness (bearings) (µm)± 3.0





































































































































































































































































































































































































































































































































































































































































































































































































































































































































































































































Eccentricity (bearings) (µm)± 3.0





































































































































































































































































































































































































































































































































































































































































































































































































































































































































































































































Wobble (bearings) (µrad)± 50





































































































































































































































































































































































































































































































































































































































































































































































































































































































































































































































Weight (g)135





































































































































































































































































































































































































































































































































































































































































































































































































































































































































































































































Limit SwitchNone, Magnetic

Motor Compatibility

Motor TypePiezo Motor
Max. Speed (°/s)5 (MMC-103), 10 (MMC-110)

Motor/Feedback Dependent Specifications

Encoder OptionNone (Open Loop)Analog (1 Vpp)Digital (RS-422)
Typical Resolution (µ°)55010
Repeatability, bi-directional (µ°)N/A± 200± 200
Repeatability, uni-directional (µ°)N/A200200

Load Characteristics

Orientation Fr (N)Fz (N)Mr (N·m)Mz (N·m)kar (µrad/N·m)
Max. Load2010050.3150

Operating Conditions

Environmental OptionsAtmosphericHigh Vacuum 10-6 barHigh Vacuum 10-9 bar