产品名称： 步进电机平移台VT-21S
产品编号： VT-21S
台面尺寸： 21x21mm
行程： 10mm
最大载重： 1kg
分辨率： 0.5um
重复定位精度： ±4um
真空选项：
The low cost VT-21S linear stage excels in applications with very limited space due to its compact design. The stage utilizes a 2-phase stepper motor and is equipped with two mechanical limit switches. A pre-loaded ball slide creates high stiffness and superior performance. The VT-21S is available with an optional linear encoder with 50 nm resolution. The stages can be mounted in XY or XYZ configuration in a space-saving arrangement. Versions capable of operation in vacuum (10-6 mbar) are available. The VT-21S is compatible with the MMC-200 controller.
| Travel range [mm] | 10 |
| Straightness/Flatness [µm] | ± 2.5 |
| Pitch [µrad] | ± 150 |
| Yaw [µrad] | ± 150 |
| Weight [g] | 100 |
| Motor option | 2-Phase Stepper Motor, SM-001 |
| Speed, max [mm/s] | 5 |
| Encoder option | None (open loop) | Analog (1 Vpp) | Digital (RS-422) |
| Resolution, typical [µm] | ± 0.5 | ± 0.05 | ± 0.05 |
| Repeatability, bi-directional [µm] | ± 4 | ± 0.2 | ± 0.2 |
| Repeatability, uni-directional [µm] | 0.5 | 0.2 | 0.2 |
| Accuracy [µm] | ± 10 | ± 1 | ± 1 |
| Orientation | Fx [N] | Fy [N] | Fz [N] | Mx [N·m] | My [N·m] | Mz [N·m] |
| Load, max | 10 | 10 | 10 | 0.4 | 0.6 | 0.5 |
| Order no.: | VT-21- | |||||
|---|---|---|---|---|---|---|
| Drive | ||||||
| Stepper Motor, SM-001 | 1 | |||||
| Travel | ||||||
| 10 mm | 1 | |||||
| Encoder | ||||||
| None (open loop) | 0 | |||||
| Analog (1 Vpp) | 2 | |||||
| Digital (RS-422) | 3 | |||||
| Digital low cost, 0.5 µm | 4 | |||||
| Limit Switch | ||||||
| Mechanical | 1 | |||||
| Environment | ||||||
| Atmospheric | 0 | |||||
| High Vacuum, 10-6 mbar | 6 | |||||
