产品名称： 步进电机平移台PPS-60SM
产品编号： PPS-60SM
台面尺寸： 60 × 60mm
行程： 25、50、100、200、300mm
最大载重： 15kg
分辨率： 50nm
重复定位精度： ±100nm
真空选项：
The PPS-60 is a high-precision, long travel linear stage. The same stage is available with piezo motor, linear motor or stepper motor drives. Ball bearings assure high stiffness and guiding accuracy for loads up to 150N. The PPS-60 is available with an optional linear encoder for increased resolution and repeatability. PPS-60 stages can be mounted in XY without any adapter, and a Z-axis can be added with the use of a standard mounting bracket.
| Travel range [mm] | 25 | 50 | 100 | 200 | 300 |
| Straightness/Flatness [µm] | ±2.5 | ±4 | ±6 | ±8 | ±10 |
| Pitch [µrad] | ±50 | ±75 | ±100 | ±125 | ±150 |
| Yaw [µrad] | ±50 | ±75 | ±100 | ±125 | ±150 |
| Motor option | 2-Phase Stepper Motor |
| Speed, max [mm/s] | 5 (15 with external stepper motor) |
| Encoder option | Open Loop | Analog | Digital | Digital Low Cost |
| Resolution, typical [µm] | 0.1 | 0.1 | 0.05 | 0.5 |
| Repeatability, bi-directional [µm] | ±4 | ±0.1 | ±0.1 | ±1 |
| Repeatability, uni-directional [µm] | 0.2 | 0.1 | 0.1 | 1 |
| Accuracy [µm] | ±10 | ±1 | ±1 | ±3 |
| Orientation | Fx[N] | Fy[N] | Fz[N] | Mx[N·m] | My[N·m] | Mz[N·m] | kax[µrad/N·m] | kay[µrad/N·m] |
| Load, max | 5 | 100 | 150 | 10 | 10 | 10 | 100 | 100 |
| Order no.: | PPS-60- | |||||
|---|---|---|---|---|---|---|
| Drive | ||||||
| Internal Stepper Motor, SM-001 | 2 | |||||
| External Stepper Motor, SM-001 | 4 | |||||
| Travel | ||||||
| 25mm | 1 | |||||
| 50mm | 2 | |||||
| 100mm | 3 | |||||
| 200mm | 4 | |||||
| 300mm | 5 | |||||
| Encoder | ||||||
| None | 0 | |||||
| Analog (1 Vpp) | 2 | |||||
| Digital (RS-422) | 3 | |||||
| Digital low cost, 0.5µm | 4 | |||||
| Limit Switch | ||||||
| None | 0 | |||||
| Mechanical | 1 | |||||
| Optical | 2 | |||||
| Environment | ||||||
| Atmospheric | 0 | |||||
| High Vacuum, 10-6 mbar | 6 | |||||
| Ultra High Vacuum, 10-9 mbar | 9 | |||||
