产品名称： 步进电机升降台ES-50
产品编号： ES-50
台面尺寸： 41 × 40mm
行程： 10mm
最大载重： 1kg
分辨率： 50nm
重复定位精度： ±200nm
真空选项：
The ES-50 elevation stage is designed for applications with limited space conditions. The ES-50 stage is driven by a 2-phase stepper motor and is equipped with two mechanical limit switches. Two pre-loaded ball slides assure smooth motion and high stiffness. The ES-50 allows for a highly rigid XYZ setup without the need for adapter brackets when combined with the VT-50 series of linear stages. Versions capable of operation in vacuum (10-6 mbar) are available. The ES-50 is compatible with the MMC-200 controller.
| Travel range [mm] | 10 |
| Straightness/Flatness [µm] | ± 4 |
| Pitch [µrad] | ± 300 |
| Yaw [µrad] | ± 300 |
| Weight [g] | 110 |
| Motor option | 2-Phase Stepper Motor, SM-001 |
| Speed, max [mm/s] | 5 |
| Encoder option | None (open loop) | Analog (1 Vpp) | Digital (RS-422) |
| Resolution, typical [µm] | 0.5 | 0.05 | 0.05 |
| Repeatability, bi-directional [µm] | ± 2 | ± 0.2 | ± 0.2 |
| Repeatability, uni-directional [µm] | 0.5 | 0.2 | 0.2 |
| Accuracy [µm] | - | ± 1 | ± 1 |
| Orientation | Fx [N] | Fy [N] | Fz [N] | Mx [N·m] | My [N·m] | Mz [N·m] |
| Load, max | 5 | 5 | 10 | 1 | 1 | 1 |
| Order no.: | ES-50- | |||||
|---|---|---|---|---|---|---|
| Drive | ||||||
| Stepper Motor, SM-001 | 1 | |||||
| Travel | ||||||
| 10 mm | 1 | |||||
| Encoder | ||||||
| None (open loop) | 0 | |||||
| Analog (1 Vpp) | 2 | |||||
| Digital (RS-422) | 3 | |||||
| Limit Switch | ||||||
| Mechanical | 1 | |||||
| Environment | ||||||
| Atmospheric | 0 | |||||
| High Vacuum, 10-6 mbar | 6 | |||||
