产品名称： 步进电机升降台PZS-90
产品编号： PZS-90
台面尺寸： 90 × 90mm
行程： 35mm
最大载重： 15kg
分辨率： 100nm
重复定位精度： ±100nm
真空选项：
The PZS-90 elevation stage is designed for application with limited space conditions. Pre-loaded cross roller bearings assure smooth motion and high stiffness. The PZS-90 allows for a highly rigid XZ or XYZ setup without the need for adapter brackets when combined with the VT-50L series & PPS-60 series of linear stages. The PZS-90 stage is driven by a 2-phase stepper motor and is equipped with two mechanical limit switches. An optional linear encoder provides higher accuracy versus the open loop option. Versions capable of operation in vacuum (10-6 mbar) are available. The PZS-90 is compatible with the MMC-200 controller.
| Travel range [mm] | 35 |
| Straightness/Flatness [µm] | ± 3 |
| Pitch [µrad] | ± 200 |
| Yaw [µrad] | ± 200 |
| Weight [g] | 1145 |
| Motor option | 2-Phase Stepper Motor, SM-003 |
| Speed, max [mm/s] | 10 |
| Encoder option | None (open loop) | Analog (1 Vpp) | Digital (RS-422) | Digital Low Cost (RS-422) |
| Resolution, typical [µm] | 0.5 | 0.1 | 0.1 | 0.5 |
| Repeatability, bi-directional [µm] | ± 2 | ± 0.1 | ± 0.1 | ± 1 |
| Repeatability, uni-directional [µm] | 0.5 | 0.1 | 0.1 | 1 |
| Accuracy [µm] | ± 15 | ± 1 | ± 1 | ± 3 |
| Orientation | Fx[N] | Fy[N] | Fz[N] | Mx[N·m] | My[N·m] | Mz[N·m] | k?x[µrad/N·m] | k?y[µrad/N·m] |
| Load, max | 75 | 75 | 150 | 50 | 50 | 100 | 50 | 50 |
| Order no.: | PZS-90- | |||||
|---|---|---|---|---|---|---|
| Drive | ||||||
| Stepper Motor, SM-003 | 1 | |||||
| Travel | ||||||
| 35 mm | 1 | |||||
| Encoder | ||||||
| None | 0 | |||||
| Analog (1 Vpp) | 2 | |||||
| Digital (RS-422) | 3 | |||||
| Digital Low Cost | 4 | |||||
| Limit Switches | ||||||
| Mechanical | 1 | |||||
| Environment | ||||||
| Atmospheric | 0 | |||||
| High Vacuum, 10-6 mbar | 6 | |||||
