产品名称： 微驱动器MPA-20
产品编号： MPA-20
台面尺寸： /mm
行程： 12mm
最大载重： 10kg
分辨率： 0.1um
重复定位精度： ±1um
真空选项：
The MPA-20 linear actuator is designed for ultra high vacuum (10-9 mbar) environments and limited space applications.
Typical applications include actuation of manual drive stages and mirror mounts. It utilizes a 2-phase stepper motor and two hermetically sealed mechanical limit switches. The MPA-20 is is compatible with the MMC-200 controller.
| Travel range [mm] | 12 |
| Motor option | Stepper Motor, SM-005 |
| Encoder option | None (Open Loop) |
| Resolution, typical [µm] | 0.1 |
| Repeatability, bi-directional [µm] | ± 1 |
| Repeatability, uni-directional [µm] | 1 |
| Accuracy [µm] | 10 |
| Orientation | Fx [N] | Fy [N] | Fz [N] | Mx [N·m] | My [N·m] | Mz [N·m] |
| Load, max | 100 | 10 | 10 | - | - | - |
| Order no.: | MPA-20- | |||||
|---|---|---|---|---|---|---|
| Drive | ||||||
| Stepper Motor, SM-005 | 1 | |||||
| Travel | ||||||
| 12 mm | 1 | |||||
| Encoder | ||||||
| None | 0 | |||||
| Limit Switches | ||||||
| Mechanical | 1 | |||||
| Environment | ||||||
| Ultra High Vacuum, 10-9 mbar | 9 | |||||
