产品名称： 直线电机位移台PPS-60LM
产品编号： PPS-60LM
台面尺寸： 60 x 60mm
行程： 25、50、100、200、300mm
最大载重： 15kg
分辨率： 2nm
重复定位精度： ±20nm
真空选项：
The PPS-60 is a high-precision, long travel linear stage. The same stage is available with piezo motor, linear motor or stepper motor drives. Ball bearings assure high stiffness and guiding accuracy for loads up to 150N. The PPS-60 is available with an optional linear encoder for increased resolution and repeatability. PPS-60 stages can be mounted in XY without any adapter, and a Z-axis can be added with the use of a standard mounting bracket.
| Travel range [mm] | 25 | 50 | 100 | 200 | 300 |
| Straightness/Flatness [µm] | ±2.5 | ±4 | ±6 | ±8 | ±10 |
| Pitch [µrad] | ±50 | ±75 | ±100 | ±125 | ±150 |
| Yaw [µrad] | ±50 | ±75 | ±100 | ±125 | ±150 |
| Motor option | Linear Motor, LM-002 |
| Speed, max [mm/s] | 100 |
| Encoder option | Analog(1Vpp) | Digital (RS-422) | Digital Low Cost |
| Resolution, typical [µm] | 0.001 | 0.002 | 0.5 |
| Repeatability, bi-directional [µm] | ±0.05 | ±0.02 | ±1 |
| Repeatability, uni-directional [µm] | 0.05 | 0.02 | 1 |
| Accuracy [µm] | ±1 | ±1 | ±3 |
| Orientation | Fx[N] | Fy[N] | Fz[N] | Mx[N·m] | My[N·m] | Mz[N·m] | kax[µrad/N·m] | kay[µrad/N·m] |
| Load, max | 5 | 100 | 150 | 10 | 10 | 10 | 100 | 100 |
Order no.:PPS-60-Drive Linear Motor, LM-0043Travel 25mm150mm2100mm3200mm4300mm5Encoder Analog (1 Vpp)2Digital (RS-422)3Digital low cost, 0.5µm4Limit Switch None0Mechanical1Optical2Environment Atmospheric0High Vacuum, 10-6 mbar6
