Low power, good reflectivity broadband metal mirror for deep UV through near-IR; 193 – 1200 nm. Designed to achieve > 90% reflectivity at 193 nm, these mirrors use a high density aluminum coating with dielectric overcoat to maximize UV reflectivity and durability, while maintaining > 85% average reflectivity for 400 - 1200 nm.

Deep UV aluminum mirrors utilize our high density aluminum coating technology, and are designed to offer significantly higher reflectivity and durability at 193 nm than standard protected aluminum mirrors.  They also offer > 85% average reflectivity at visible and near-infrared wavelengths, making them a good general-purpose light routing mirror.  A dielectric overcoat minimizes oxidation and increases abrasion resistance.  All mirrors are coated on UV-grade fused silica, and are precision-polished for low transmitted wavefront distortion, low wedge, and good surface quality.  Damage threshold is low, limiting their use in pulsed laser applications.  Applications include ellipsometry, spectroscopy, and semiconductor lithography and metrology.
• Optimized for > 90% reflectivity at 193 nm
• > 85% average reflectivity for 400 – 1200 nm
• Dielectric overcoat for protection
• Custom sizes, curvatures, and substrate options available